We have realized a micromachined micro Coriolis mass flow sensor with integrated capacitive readout to detect the extremely small
Coriolis vibration of the sensor tube.
A special comb-like detection electrode design eliminates
the need for multiple metal layers and sacrificial layer etching methods. Using
differential readout signals significantly reduces the influence of parasitic
capacitances.
In addition, the sensing electrodes have been realized on a
suspended tube structure which will allow for tuning of the electrode
separation by a DC current. First measurements using water, ethanol and white
gas indicate that true mass flow is measured by the sensor and that sensor
output is linear with mass flow. The measurement error is currently in the
order of 2% of the full scale of 1.2 ml/hr for all measured liquids (which
corresponds to 1.2 g/hr in the case of water).
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