Lfoundry Srl, the foundry that closed
down a wafer fab in Rousset, France and moved its headquarters to
Avezzano, Italy, has announced plans to supply MEMS-based pressure
sensors.
Lfoundry has formed an alliance with Scannano Oy (Turku, Finland) to use Scannano's deep vacuum gap (DVG) and micro-membrane technology to produce pressure sensors with higher levels of accuracy than currently available and with more miniaturization and lower power consumption. In addition the Scannano technology allows the pressure sensor technology to be fabricated on the same die as the ASIC using standard CMOS processes.
The DVG process is used to create a tiny vacuum gap with nanometer accuracy and a sensing membrane. Deformation of the sensing membrane occurs in the range of a few nanometers allowing a high degree of accuracy, LFoundry said.
Applications for the new pressure sensors are widespread and include over 100 devices in a range of automotive and industrial products, according to LFoundry. Automotive applications can include safety systems such as crash detection and tyre pressures and power train devices such as manifold and turbo air pressures. Industrial applications can include gas flows, level meters, altitude compensation systems and weather stations. Device design activities are already under way and manufacturing will commence at Foundry’s Italian facility in Avezzano near Rome.
Cross-section of silicon produced under DVG showing nanometer scale vacuum gap as white layer. Source: Scannano Oy.
The DVG technology was invented by Andrei Pavlov and Yelena Pavlova and Scannano founded in 2007. A codevelopment project was started with STMicroelectronics and CEA-Leti in January 2011 for the creation of RF-MEMS. The DVG process dispenses with the use of a sacrificial layer and the etching required to remove that layer making it a simpler process and compatible with conventional CMOS processing.
LFoundry has a manufacturing capacity of more than 40,000 wafer starts per month and includes analog processes and 90nm processes and copper manufacturing, the company said. LFoundry provides its own supporting IP for 150nm and 110nm processes.
Lfoundry received a grant worth about €1.3 million (about $1.4 million) as part of a development contract to support the Abruzzo region of Italy.
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Lfoundry has formed an alliance with Scannano Oy (Turku, Finland) to use Scannano's deep vacuum gap (DVG) and micro-membrane technology to produce pressure sensors with higher levels of accuracy than currently available and with more miniaturization and lower power consumption. In addition the Scannano technology allows the pressure sensor technology to be fabricated on the same die as the ASIC using standard CMOS processes.
The DVG process is used to create a tiny vacuum gap with nanometer accuracy and a sensing membrane. Deformation of the sensing membrane occurs in the range of a few nanometers allowing a high degree of accuracy, LFoundry said.
Applications for the new pressure sensors are widespread and include over 100 devices in a range of automotive and industrial products, according to LFoundry. Automotive applications can include safety systems such as crash detection and tyre pressures and power train devices such as manifold and turbo air pressures. Industrial applications can include gas flows, level meters, altitude compensation systems and weather stations. Device design activities are already under way and manufacturing will commence at Foundry’s Italian facility in Avezzano near Rome.
Cross-section of silicon produced under DVG showing nanometer scale vacuum gap as white layer. Source: Scannano Oy.
The DVG technology was invented by Andrei Pavlov and Yelena Pavlova and Scannano founded in 2007. A codevelopment project was started with STMicroelectronics and CEA-Leti in January 2011 for the creation of RF-MEMS. The DVG process dispenses with the use of a sacrificial layer and the etching required to remove that layer making it a simpler process and compatible with conventional CMOS processing.
LFoundry has a manufacturing capacity of more than 40,000 wafer starts per month and includes analog processes and 90nm processes and copper manufacturing, the company said. LFoundry provides its own supporting IP for 150nm and 110nm processes.
Lfoundry received a grant worth about €1.3 million (about $1.4 million) as part of a development contract to support the Abruzzo region of Italy.
If you want to get more about gas sensor,gas transmitter, humidity sensors suppliers, humidity sensors manufactures, infrared sensors manufactures, infrared sensors suppliers,gas sensor manufactures,gas sensor suppliers from en.ofweek.com, please follow http://en.ofweek.com/manufacturer/sensor.
For more:
http://en.ofweek.com/Automation-id1001
http://en.ofweek.com/Manufacturing-Processing-Machinery-id1017
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